| 摘要 |
PROBLEM TO BE SOLVED: To provide a valveless liquid supply device capable of eliminating restriction of an arranging position of a liquid tank, while maintaining a valveless liquid supply method. SOLUTION: A downward extending inner pipe 114 is installed in an upper cover of the liquid tank 110, and a supply pipe 116 taking out and supplying liquid in the liquid tank 110 to an external part, is arranged inside the inner pipe 114. An opening upper end part of the supply pipe 116 is arranged in a position higher than an initial position of a liquid level 162. When the liquid is not supplied, an exhaust line is opened by a three-way valve 150, and vaporized gas is exhausted in the inner pipe 114. At this time, the liquid level 162 is kept below the opening upper end part of the supply pipe 116, and the liquid does not flow out to the external part. When supplying the liquid, a pressurizing line is opened by the three-way valve 150, and high pressure gas is introduced into the liquid tank 110. Thus, the liquid level is pressurized, and the liquid level in the inner pipe 114 rises, and the liquid flows in the supply pipe 116 from the inside of the inner pipe 114, and is supplied to the external part. COPYRIGHT: (C)2009,JPO&INPIT
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