| 摘要 |
PROBLEM TO BE SOLVED: To provide film-forming apparatus capable of forming a film stably without generating abnormal discharge in the film-forming equipment. SOLUTION: In the film-forming apparatus, a coil 60 for blocking a gap having an annular center axis is interposed between a heater 15 and a heater base 3 along the periphery of the heater 15. The heater 15 and the heater base 3 are composed so that they can be elevated. A flexible, conductive plate member 30 for holding the chamber 2, heater 15 and heater base 3 at the same potential is arranged so that it joins the chamber 2, heater base 3 and heater 15. The plate member 30 is energized to the heater base 3 and heater 15 by a coil 60 for energizing plates having an annular center axis arranged in parallel with the plate member 30. COPYRIGHT: (C)2009,JPO&INPIT
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