| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming composition which can form a film having good properties such as a dielectric constant and mechanic strength and good surface state, a film formed by using the film-forming composition, and an electronic device having the film. SOLUTION: The film-forming composition comprises a compound represented by formula (I) (wherein X is a structure selected from an adamantane structure, a diadamantane structure, a biadamantane structure, and a triadamantane structure and when X is the admantane structure, n is 3 or 4, and when X is the structure other than the adamantane structure, n is an integer of 3-6), and the film is formed by using the above film-forming composition, and the electronic device has the film. COPYRIGHT: (C)2009,JPO&INPIT
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