发明名称 METHOD OF MAKING INTEGRATED CIRCUIT (IC) INCLUDING AT LEAST ONE STORAGE CELL
摘要 A storage cell, integrated circuit (IC) chip with one or more storage cells that may be in an array of the storage cells and a method of forming the storage cell and IC. Each storage cell includes a stylus, the tip of which is phase change material. The phase change tip may be sandwiched between an electrode and conductive material, e.g., titanium nitride (TiN), tantalum nitride (TaN) or n-type semiconductor. The phase change layer may be a chalcogenide and in particular a germanium (Ge), antimony (Sb), tellurium (Te) (GST) layer.
申请公布号 US2008248624(A1) 申请公布日期 2008.10.09
申请号 US20080136158 申请日期 2008.06.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HORAK DAVID V.;LAM CHUNG H.;WONG HON-SUM P.
分类号 H01L21/00;G11C11/56;G11C13/00;H01L21/20;H01L27/10;H01L27/24;H01L29/04;H01L45/00 主分类号 H01L21/00
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