发明名称 |
Fabrication of microstructures and nanostructures using etching resist |
摘要 |
Nanostructures and microstructures are formed by patterning methods such as Dip Pen Nanolithography (DPN) or microcontact printing of organic molecules functioning as a resist on a substrate followed by an etching step. The etch resist is a patterning composition and can contain on a substrate including polyethylene glycol (PEG). Positive and negative etch methods can be used. |
申请公布号 |
AU2007350336(A1) |
申请公布日期 |
2008.10.09 |
申请号 |
AU20070350336 |
申请日期 |
2007.12.17 |
申请人 |
NORTHWESTERN UNIVERSITY |
发明人 |
CHAD A. MIRKIN;LING HUANG;RAYMOND SANEDRIN |
分类号 |
G03F7/00;B82B3/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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