发明名称 |
Method for the determination of points on a specimen carrying a specific signal frequency by use of a scanning microscope |
摘要 |
A method and apparatus for determination of specific points on a specimen carrying a signal having a specific signal frequency by use of a scanning microscope. A detector provides a secondary electrical signal corresponding to respective particular scan points. An output of the detector connects to first and second evaluation circuits which each output a signal based on and representative of the specific signal frequency. The first evaluation circuit has a band-width substantially narrower than the second evaluation circuit. An output signal of the second evaluation circuit determines when to switch a scanning generator of the scanning microscope from a first scan rate to a second slower scan rate. The output signal of the first evaluation circuit is employed for evaluation relative to the specific points carrying the specific signal frequency.
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申请公布号 |
US4689555(A) |
申请公布日期 |
1987.08.25 |
申请号 |
US19860837813 |
申请日期 |
1986.03.10 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BRUST, HANS-DETLEF;OTTO, JOHANN |
分类号 |
G01R31/26;G01R31/302;G01R31/305;H01J37/28;H01L21/66;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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