SOLID-STATE IMAGING APPARATUS, GRAY SCALE MASK, COLOR FILTER AND MICROLENS

摘要

PROBLEM TO BE SOLVED: To suppress the generation of color shading which is a difference in chrominance signal levels generated at the center and peripheral part of an imaging region in an image formed in the imaging region of a solid-state imaging apparatus. SOLUTION: In the solid-state imaging apparatus 10B in which a plurality of photoelectric conversion elements 13 are two-dimensionally provided on a semiconductor substrate 11, a convex color filter layer 22 formed on the photoelectric conversion element 13 is formed so as to be a thin film as approaching the peripheral part of the imaging region, and furthermore, a convex microlens 23 formed so as to be shifted to the inner side from the center axis of the photoelectric conversion element 13 and to cover the color filter layer 22 is set so that a curvature increases on the outer side as approaching the peripheral part of the imaging region and a vertex is positioned further outside the center axis of the photoelectric conversion element 13. COPYRIGHT: (C)2009,JPO&INPIT