发明名称 SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor apparatus in which a MOS transistor and a lateral bipolar transistor, having a fully ensured breakdown voltage, are formed on the same SOI substrate. SOLUTION: A semiconductor apparatus has a MOS transistor 51, having an n-type source region 62s and an n-type drain region 62d formed on a buried oxide film 14 and by which a p-type channel region 60 is sandwiched, and a gate electrode 54 formed on the channel region 60 via a gate oxide film 52; and a bipolar transistor 81, having an n-type collector region 92c and an n-type emitter region 92e, formed so as to sandwich a p-type base region 90, a p-type base contact region 89 adjacent to the base region 90 in the channel width direction, and a dummy pattern 84 formed on the base region 90 via a second oxide film 82. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008244321(A) 申请公布日期 2008.10.09
申请号 JP20070085459 申请日期 2007.03.28
申请人 OKI ELECTRIC IND CO LTD;MIYAGI OKI ELECTRIC CO LTD 发明人 KIJIRO KOICHI;YUKI KOJI
分类号 H01L21/8249;H01L21/331;H01L21/8222;H01L21/8248;H01L27/06;H01L29/73;H01L29/786 主分类号 H01L21/8249
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