| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for measuring the number of particulates in ultrapure water, capable of easily and precisely measuring particulates in ultrapure water. SOLUTION: The ultrapure water is introduced into a membrane separation device 1 and subsequently separated into a concentrate brine and a dilution water through a separating membrane 1a. The concentrate brine is introduced into a particulate number counting device 5 by means of a concentrate water extracting pipe 2 through a flow control valve 3 and a flowmeter 4, and hence the number of the particulates is measured. The measured values of the particulate number counting device 5 and the flowmeters 4, 8 are input to a calculating device 9, respectively. The calculating device 9 calculates the number of the particulates per unit volume of the ultrapure water by dividing the measured value (a) of the particulate number counting device 5 by a concentration multiplying factor. COPYRIGHT: (C)2009,JPO&INPIT
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