| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measurement apparatus and a surface shape measurement method for accurately measuring a surface shape. SOLUTION: The surface shape measurement apparatus of the invention comprises a sensor head 12 provided with a light source 21, and an optical sensor 25 for receiving a reflection light reflected by a sample 11; an X-drive mechanism 17 for changing a relative position between the sensor head 12 and the sample 11; a position extracting section 31 for extracting the incident position of the reflection light on the optical sensor 25; a transform section 32 for transforming position data for mapping the relative position to the incident position of the reflection light into frequency domain data; a filter section 33 for filtering a component of the frequency domain data at a fixed frequency or higher, or in a predetermined frequency band; and an inverse transform section 34 for inverse-transforming the filtered frequency domain data into spatial domain data. COPYRIGHT: (C)2009,JPO&INPIT
|
