| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe capable of ensuring the good electric contact with a sample, and to provide a measuring instrument using the probe. SOLUTION: Oval or spherical conductive rubber material 12 is fixed to the leading end of a probe base part 11 and a probe of SPM is constituted of the probe base part 11 and the conductive rubber material 12. As the probe base part 11, a conventional probe of SPM. When the probe is pressed to the sample, the conductive rubber material 12 is deformed, corresponding to its elasticity. For example, if a sample having a pad 51, an insulating part 52 and wiring 53 is pressed to the pad 51 of the sample, the conductive rubber material 12 is deformed so as to follow the surface unevenness of the pad 51. Accordingly, the contact area of them is widely ensured, thus resulting in good electric contact between the probe and the pad 51. COPYRIGHT: (C)2009,JPO&INPIT
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