| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid supply inspection method of a dynamic pressure fluid bearing capable of injecting a proper liquid quantity and completing high precision inspections by stabilizing the liquid supply state with temperature variation of the lubricating fluid, and a liquid supply inspection device. SOLUTION: In the liquid supply inspection device 10 of the dynamic pressure fluid bearing 1, and in the vicinity of a lubricating fluid container 24 located in a vacuum vessel 11 and in the vicinity of a nozzle 25 at the tip end of a dispenser 23, and also additionally on the upper part of a driving stage 13, heaters 14C, 14A, 14B are mounted to always keep fed lubricating fluid 2 at a predetermined temperature by a temperature controller 15. Further, in the vacuum vessel 11, imaging devices 19, 22 are installed so that the state after the liquid supply can be confirmed. COPYRIGHT: (C)2009,JPO&INPIT
|
