| 摘要 |
Disclosed is a system which makes it possible to determine whether or not a new operation recipe is applicable to a substrate processing apparatus, the apparatus including plural functional components which operate to perform predetermined tasks to a substrate, and a controller comprising a computer which controls operations of the plural functional components based on an operation recipe including a plurality of operation parameters. An electronic medium storing a new operation recipe and a judgment program is connected to the computer of the substrate processing apparatus. The new operation recipe is retrieved from the electronic medium by means of the computer. The computer executes the judgment program to determine, by using the judgment program, whether or not the new operation recipe can be executed by the functional components.
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