发明名称 COLOR FILTER MASK LAYOUT OF CMOS IMAGE SENSOR
摘要 Embodiments relate to a color filter mask layout that may be capable of reducing an SNR by preventing an occurrence of a corner rounding during manufacturing of a color filter. In embodiments, a color filter mask layout may include a blue color filter mask pattern disposed at a center part, a red color filter mask pattern disposed in a diagonal direction of the blue color filter mask pattern to be spaced apart from the blue color filter mask pattern, a green color filter mask pattern disposed in a diagonal direction of the blue color filter mask pattern to be spaced apart from the blue color filter mask pattern, and a correction mask pattern for an optical proximity correction installed at a corner of the green color filter mask pattern.
申请公布号 KR100862855(B1) 申请公布日期 2008.10.09
申请号 KR20050123362 申请日期 2005.12.14
申请人 发明人
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
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