发明名称 SYSTEM FOR VISION INSPECTION OF SEMICONDUCTOR DEVICE
摘要 <p>The present invention to provide a system for vision insfection of semiconductor device that is capable of receiving a tray to be visually inspected and an unloading tray to receive semiconductor device sorted as good products as a result of the vision inspection to the same loader, and distributing the good semiconductor device to a tray stacked in the same loader or a tray stacked in the opposite loader according to the results of the vision inspection, thereby eliminating a necessity to individually provide loaders and unloaders, and therefore, reducing the size of equipment.</p>
申请公布号 WO2008120881(A1) 申请公布日期 2008.10.09
申请号 WO2008KR01603 申请日期 2008.03.21
申请人 INTEKPLUS CO., LTD;LIM, SSANG-GUN;LEE, SANG-YUN;JOO, BYEONG-GWON;SON, DONG-KYU 发明人 LIM, SSANG-GUN;LEE, SANG-YUN;JOO, BYEONG-GWON;SON, DONG-KYU
分类号 H01L21/66 主分类号 H01L21/66
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