| 摘要 |
PURPOSE:To prevent gas from leaking from a quartz tube and penetrating into a clean room, by providing a groove on the fitting portions between the quartz tube and its cover, CONSTITUTION:A cover 4 of quartz 4 is fitted on a tapered and flat-spotted portion 3 of a quartz tube 1. An exhaust port 5 is provided at the center of the cover 4 so that gas introduced into the quartz tube 1 is discharged through the exhaust port 5. A groove 6 is formed around the outer periphery of the flat-spotted portion 3 such that a part of the groove 6 is extended to the outside of the cover. The portion of the groove 6 extending to the outside of the cover enables the introduced gas to flow out of the tube. In this manner, the tube is allowed to have improved hermetic properties and the gas can be effectively prevented from leaking from the tube and entering into a clean.
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