| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an XY step exposure device which is free of maldistribution of fine common defects in colored pixels etc., even when intervals of proximity exposure are set while an exposure stage is moved in steps. <P>SOLUTION: A Z assist mechanism 10 which prevents a Z stage 71 from tilting forward on a pedestal 72 in a travel direction of the exposure stage at the end of step movement owing to inertia of the exposure stage 60 due to acceleration during speed reduction is provided between the Z stage and an XYθ fine movement stage, and the Z assist mechanism is placed in operation during the step movement to fix the Z stage and XYθ fine movement stage 80. A gradient of speed variation during speed reduction of the exposure stage is set to ≤400 mm/sec<SP>2</SP>. <P>COPYRIGHT: (C)2009,JPO&INPIT |
