| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve at least one of problems which are caused at a joint portion of patterns formed by using an array of a large number of individually controllable elements, or to substantially solve the one of the problems. <P>SOLUTION: A device manufacturing method includes a process that a pattern is given to an array of a plurality of individually controllable elements so as to modulate a radiation beam, and the modulated radiation beam is projected to a substrate. The patterns given to the plurality of individually controllable elements are set so that the modulated radiation beam includes the background radiation of a predetermined magnitude. The predetermined magnitude of the background radiation depends on a position of the array of the individually controllable elements. <P>COPYRIGHT: (C)2009,JPO&INPIT |
