| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device capable of conducting a laser scribing treatment, when a film is formed on one face of a to-be-cleaved substrate, while placing the substrate on a suction table with the other face, on which a film is not formed, facing the side of a scribing head without bringing the suction table into contact with the surface of the film formed on the to-be-cleaved substrate. <P>SOLUTION: A rib protrusion 441 is arranged on a suction table 431 so that contact between the suction table and the surface of the film formed on the to-be-cleaved substrate or a specified area in the surface is avoided. Then, the to-be-cleaved substrate is placed on the protrusion. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
