METHOD FOR PRODUCING TRANS-DECAHYDRONAPHTHALENE

摘要

PROBLEM TO BE SOLVED: To provide a trans-decahydronaphthalene effective for further reducing the absorbance of decalin suitable as a liquid for immersion exposure having excellent light transmittance at 193 nm wavelength. SOLUTION: The method for producing trans-decahydronaphthalene having a light absorbance of≤0.040 at 193 nm wavelength per 1 cm of the optical length of the liquid comprises the first step to prepare trans-decahydronaphthalene having a light absorbance of≤0.20 at 193 nm wavelength per 1 cm of the optical length of the liquid and the second step to contact the trans-decahydronaphthalene prepared by the first step with an oxide containing Al2O3. COPYRIGHT: (C)2009,JPO&INPIT