ELECTROMECHANICAL DEVICE, MANUFACTURING METHOD THEREOF AND RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide an electromechanical device which prevents a fluctuation in a resonance frequency and improves a yield by eliminating positional deviation of supports resulting from a deviation in adapting a mask, its manufacturing method and a resonator by the electromechanical device. SOLUTION: The electromechanical device 25 having a moving member 10 arranged on a substrate 5 through space 27 is provided with a protective film 15 for sealing the electromechanical device 25 through space 26, wherein the protective film 15 and the moving member 10 are supported by supports 16A and 16B that penetrate the moving member 10. COPYRIGHT: (C)2009,JPO&INPIT