发明名称 |
RECIPE REPORT CARD FRAMEWORK AND METHODS THEREOF |
摘要 |
A computer-implemented method for performing recipe evaluation is provided. The computer-implemented method includes integrating a plurality of data sources into a single recipe report card framework. The recipe report card framework includes an editor for interacting with the plurality of data sources. The computer-implemented method also includes displaying a plurality of graphical displays. Each graphical display of the plurality of graphical displays is configured to present a signal parameter of a set of signal parameters for at least a substrate. The computer-implemented method further includes providing a plurality of criteria for each of the set of signal parameters. The computer-implemented method yet also includes providing a plurality of ranges for the each of the set of signal parameters. The computer-implemented method yet further includes providing an expert guide, which is configured to provide guidance in analyzing a recipe.
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申请公布号 |
US2008244400(A1) |
申请公布日期 |
2008.10.02 |
申请号 |
US20070693708 |
申请日期 |
2007.03.29 |
申请人 |
HUANG CHUNG-HO;HEFTY ROBERT;LUI ANDREW;HUMBIRD DAVE;POTTER CHARLES |
发明人 |
HUANG CHUNG-HO;HEFTY ROBERT;LUI ANDREW;HUMBIRD DAVE;POTTER CHARLES |
分类号 |
G06F3/048 |
主分类号 |
G06F3/048 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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