发明名称 |
TWO-AXIS DRIVING ELECTROMAGNETIC MICRO-ACTUATOR |
摘要 |
Provided is a two-axis driving electromagnetic actuator that includes a stage that is operative to be actuated about a first axis; an inner frame that that is disposed outside the stage and supports the stage by the first axis; an external frame that is disposed outside the inner frame and supports the inner frame by a second axis which is perpendicular to the first axis; a magnet that provides an electric field between the first axis and the second axis; a first driving coil that is formed on the inner frame and to which a first signal that actuates the stage in a direction of the second axis is applied; and a second driving coil that is formed on the inner frame and to which a second signal that actuates the stage and the inner frame in a direction of the first axis is applied, wherein the first driving coil and the second driving coil are electrically separated from each other.
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申请公布号 |
US2008238592(A1) |
申请公布日期 |
2008.10.02 |
申请号 |
US20070862233 |
申请日期 |
2007.09.27 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KO YOUNG-CHUL;CHO JIN-WOO;CHOI WOO-HYEK;JUNG HEE-MOON |
分类号 |
H01F7/06;G02B26/08 |
主分类号 |
H01F7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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