| 摘要 |
A transfer device and an inspection device of an inspecting target are provided to perform a low-temperature inspection process by supplying an inspecting target without the waiting time. A transfer device(17) includes a transfer arm(17A) for transferring an inspection object to an inspection chamber in order to perform a low-temperature inspection process. The transfer device further includes an arm receiving chamber(17E) having a gateway(17F). The transfer arm is moved into the arm receiving chanber through the gateway. The transfer device further includes a gas supply unit having a first and a second supply parts for supplying a low dew point gas to the arm receiving chamber from different positions. The first supply part is configured to supply the low dew point gas toward an inspection target introduced into the arm receiving chamber by the transfer arm. |
