摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate the possibilities of disconnection of leads being extracted from exciting electrodes and deterioration in the electrical characteristics due to a step in a thick central portion formed by wet etching, in an AT cut quartz oscillating piece having a mesa structure. <P>SOLUTION: The quartz oscillating piece 11 has a mesa structure, consisting of the thick central portion 2 and a thin peripheral portion which are formed by wet-etching of an AT cut quartz plate. The leads 17 and 18, connected to the exciting electrodes 13 and 14 on the thick central portion and connected to corresponding connection electrodes 15 and 16 in the thin peripheral portion, are extracted from an end edge 12a in the -Z' axis direction of the thick central portion, on the +Y' plane of the AT cut quartz plate and from an end edge 12b in the +Z' axis direction of the thick central portion on the -Y' plane on the opposite side. <P>COPYRIGHT: (C)2009,JPO&INPIT |