| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a metallic film having a crystal structure suitable for a device, to provide a method for manufacturing a piezoelectric element, and to provide an ink-jet recording head and an ink-jet printer. <P>SOLUTION: The method for forming the metallic film comprises steps of forming an organic film 25 over a substrate 10, forming the metallic film 30a on the organic film, forming a new crystal structure different from the metallic film 30a by heating the substrate to decompose, to gasify, and to remove the organic film 25, dropping the metallic film 30a downward to the substrate 10, forming a recrystallized metallic film with the metallic film further heated, and forming a ferroelectric layer on the metallic film. <P>COPYRIGHT: (C)2009,JPO&INPIT |
