| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a highly precise local surface plasmon resonance sensor having a size and an array of metal particle or metal micro opening with high precision of nano-meter order, using a manufacturing method of low manufacturing unit price. SOLUTION: This manufacturing method for an optical element of the present invention has a process for forming a protrusion protruded outwards or a recess recessed inwards, with respect to a normal on a surface, on the at least one surface of a substrate of a dielectric substance comprising the first member, and a process for forming a film comprising the second member from a diagonal direction with respect to the normal and the surface, in the protrusion or the recess, and forms at least an area exposed with the first member of the surface adjacent to the protrusion, or an area with the first member exposed into the recess. COPYRIGHT: (C)2009,JPO&INPIT
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