| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly precise film-thickness measuring method and a measuring apparatus capable of measuring the thickness of a film, without being affected by a wave-like bend of the film resulting from the manufacture of the film, and without damaging the film. SOLUTION: For the method for measuring the thickness of the film 10 in a noncontact manner continuously, nozzles are provided for blowing air to the surface around a film-thickness measuring range of the film 10 whose thickness is measured with a film-thickness measuring sensor, from the front side and the rear side or from either one side. When the transverse thickness of the film is measured, the film-thickness measuring sensor and the blow-off nozzles are moved in the transverse direction of the film while synchronizing their positions and speeds. Besides, a film-thickness measuring apparatus is obtained. COPYRIGHT: (C)2009,JPO&INPIT
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