CLEAN UNIT, CONNECTED CLEAN UNIT, AND PROCESS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a clean unit, a connected clean unit, and a process method capable of suppressing the adhesion of dust particles on the surface of a treating object to the minimum and executing a process on a remarkably clean surface. SOLUTION: The clean unit includes a circulating type filter and is capable of maintaining a clean environment. An inner product of an area vector of the surface of a treating object during a process and a macro wind flow vector becomes zero. For example, the flow of air by the circulation type filter is set in a horizontal direction. COPYRIGHT: (C)2009,JPO&INPIT