| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring instrument for accurately measuring the position of a light beam coming into an image sensor. SOLUTION: The image sensor comprises light receiving parts disposed at prescribed intervals along at least the measurement direction of the light beam position, with electrons stored therein the number of which corresponds to the light amount of received light beam. The image sensor reads electrons stored in the respective receiving parts, and output information obtained by converting the electrons into correlative values correlating with the number of electrons stored in the respective receiving parts. The image sensor is controlled so as to output the information a plurality of times with a light beam, a measuring object at a position, caused to come into the image sensor. Correlative values at the respective light receiving parts denoted by respective pieces of information outputted a plurality of times from the image sensor are added up with respect to each light receiving part. The position of a light beam is measured with resolution higher than the prescribed intervals based on the correlative values of the respective light receiving parts obtained by the adding up. COPYRIGHT: (C)2009,JPO&INPIT
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