| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet discharge head and a liquid droplet discharge apparatus wherein enlargement of the liquid droplet discharge head and the liquid droplet discharge apparatus is suppressed and which are excellent in reliability of the electric conductive layer. SOLUTION: The liquid droplet discharge apparatus comprises a piezoelectric element 34 and an electric conductive layer 62. The piezoelectric element 34 comprises a lower electrode layer 58, an upper electrode layer 64, and a piezoelectric body layer 61 which is sandwiched between the lower electrode layer and the upper electrode layer. At least one or more of the electric conductive layer 62 are laminated at the lower layer side of the piezoelectric element via an interlayer insulating layer. The electric conductive layer comprises at least one selected from a metal of Ta, V, Nb, Mo, W, Ti, Zr, and Hf; an alloy comprising one or more of the metal elements; a nitride comprising one or more of the metal elements; a silicide comprising one or more of the metal elements; and a boride comprising one or more of the metal elements, and is connected to a drive element for driving the piezoelectric element. COPYRIGHT: (C)2009,JPO&INPIT
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