| 摘要 |
<p>A vapor deposition apparatus that is capable of forming an organic thin film of high quality. In vapor deposition apparatus (1), tray (41) is disposed in evaporation chamber (15), and supply unit (30) feeds evaporation material (16) onto the tray (41). The tray (41) is mounted on mass meter (49), and the mass of evaporation material (16) disposed on the tray (41) is measured. Control unit (45) compares the measurement value with a reference value, making the supply unit (30) feed any required amount of evaporation material (16). As the evaporation material (16) is replenished whenever required, there is no event in which the evaporation material (16) is used up in the midst of film formation and is further no event in which a large amount of evaporation material (16) is heated for a prolonged period of time, thereby avoiding deterioration of the evaporation material (16).</p> |
