| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce an error due to an effect of a refractive index distribution and an error due to an effect of diffracted light. <P>SOLUTION: A height detecting device 100 includes a lighting slit 210 having a first rectangular opening bored to pass illumination light 104, optical systems 200 and 222 which illuminate a surface of an object 101 with illumination light passed through the lighting slit 210 and images reflected light from the surface of the object 101, detection slits 230 and 240 which are installed before and behind an imaging point and have second opening parts bored so that widths of the rectangles may be shorter than the width of a lighting slit image and lengths may be longer than the length of the lighting slit image, light quantity sensors 252 and 254 which detect quantities of reflected light passed through the detection slits 230 and 240, and an arithmetic circuit 260 which computes the height of the surface of the object 101 on the basis of outputs of the light quantity sensors 252 and 254. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
