POLYCYCLIC ESTER CONTAINING ELECTRON-WITHDRAWING SUBSTITUENT AND LACTONE SKELETON, ITS POLYMER COMPOUND AND PHOTORESIST COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a novel polycyclic ester which contains an electron-withdrawing substituent and a lactone skeleton and is useful as a monomer component etc. of a highly functional polymer etc., a polymer compound and a photoresist resin composition.

SOLUTION: The polycyclic ester containing an electron-withdrawing substituent and a lactone skeleton is represented by formula (1) (wherein Rais a hydrogen atom, a 1-6C alkyl group or the like optionally having a halogen atom; R1is a halogen atom, a 1-6C alkyl group or the like optionally having a halogen atom; and A is a 1-6C alkylene group, an oxygen atom, a sulfur atom or no bond).

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