| 摘要 |
PROBLEM TO BE SOLVED: To obtain good light collection and light propagation effect by an optical waveguide, and to prevent conventional deterioration of image quality. SOLUTION: A plurality of layers of conductive films such as a gate electrode film 4 and a wiring layer 7 are provided on a semiconductor substrate 1 with a light receiving part 2 in a surface through an insulating film such as a gate insulating film 3 and a layer insulating film 6. A semiconductor substrate and a conductive film, and a plurality of layers of conductive films are connected by a contact plug 5 formed of a conductive material in a contact all part of an insulating film. Furthermore, the plurality of layers of conductive films and the contact plug are provided to a position corresponding to an upward part of a light receiving part as optical waveguide tubes 12a to 12f, and also function as an optical waveguide region. COPYRIGHT: (C)2009,JPO&INPIT
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