| 摘要 |
First, a substrate having a conductor therein is provided. Next, a first dielectric layer is disposed on the conductor and the substrate and a first opening is formed in the first dielectric layer for exposing the conductor. A first metal layer is deposited over the surface of the first dielectric layer and into the first opening. Next, an etching stop layer and a second metal layer are deposited over the surface of the first metal layer, and a pattern transfer process is performed by using a second dielectric layer as a mask to remove a portion of the first metal layer, the etching stop layer, and the second metal layer for exposing the first dielectric layer. A passivation layer is disposed on the second metal layer and the first dielectric layer and a second opening is formed in the passivation layer to expose a portion of the second metal layer.
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