| 摘要 |
A semiconductor inspection apparatus is provided to reduce a space occupied by probes by arranging a force probe and a sense probe in the substantially same line. A semiconductor inspection apparatus(1) includes a force probe(2) and a sense probe(3). The force probe applies voltage to a semiconductor device(4). The sense probe detects the voltage of the semiconductor device. The force probe is in contact with an electrode(41) of the semiconductor device, and the force probe and the sense probe are in contact with each other to measure electrical characteristics of the semiconductor device. The force probe and the sense probe are arranged in the same line as seen from a vertical direction to an electrode surface(42) of the semiconductor device.
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