TURBO MOLECULAR PUMP, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR INHIBITING DEPOSIT-ADHESION OF TURBO MOLECULAR PUMP

摘要

A turbo-molecular pump, a substrate processing apparatus, and a method for suppressing the attachment of depositions to a turbo-molecular pump are provided to heat a deposition-suppressing gas to high-temperature by increasing frictional heat between rotary wings and gas molecules. A rotor(37) includes a rotary shaft(36) aligned with an exhaust stream. A cylindrical body is formed to receive the rotor therein. A plurality of blade-shaped rotary wings(39) are protruded from the rotor perpendicularly with respect to the rotatory shaft. A plurality of blade-shaped stop wings(40) are protruded perpendicularly to the rotary shaft from an opposite side to the rotor. The blade-shaped rotary wings are divided into a plurality of rotary wing groups(41). The blade-shaped stop wings are divided into a plurality of stop wing groups(42). The rotary wing groups and the stop wing groups are arranged alternately along the rotary shaft. A gas supply port(43) is formed on an upstream side of the rotary wing group in the exhaust stream. The gas supply port supplies a deposition-suppressing gas including gas molecules having a large molecular weight.