ATMOSPHERIC PLASMA GENERATING APPARATUS WITH THE ELECTRODE PART THAT HAS SEVERAL ELECTRODES ON THE LOWER SURFACE OF A DIELECTRIC COUPLED TO THE POWER APPLIED ELECTRODE

摘要

An atmospheric plasma generating apparatus including an electrode part having several electrodes on a lower surface of a dielectric coupled to a power-applied electrode is provided to improve surface processing performance using atmospheric plasma by boosting a voltage. A first electrode(10) receives a discharge voltage from a power supply unit. A dielectric is attached to the first electrode or is formed to surround the first electrode. A second electrode(20) is attached to a lower surface of the dielectric. The second electrode includes a plurality of electrodes which are arranged in a predetermined interval from each other. An insulating layer for preventing a damage of an electrode is formed to surround the second electrode. An exterior electrode housing includes the first electrode, the dielectric, and the second electrode to surround an electrode structure.