| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an open/close valve, in which service life of a seal member is elongated. <P>SOLUTION: The open/close valve 100 is disposed between a chamber 11 maintaining the inside vacuum, and exhaust devices 53, 54. The open/close valve 100 comprises: a valve body 110 having an opening 111 communicating a chamber 11 side and a side of the exhaust devices 53, 54; a valve element 120 disposed in the valve body 110 and brought into contact with or separated from the opening 111 to open/close the opening; a seal member 120b disposed to the valve element 120, and sealing the opening 111 when the valve element 120 closes the opening 111; a straightly moving means 140 moving the valve element forward and backward; a valve evacuation part 113b which is disposed at a position separated from the opening 111 and in which the valve element 120 retracted from the opening 111 is evacuated; and a turning means 150 turning the valve element 120 between a position corresponding to the opening 111 and a position corresponding to the valve evacuation part 113b. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
