| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus which achieves deposition of the coating material on all the surfaces of a workpiece having a complex configuration in a desired manner. <P>SOLUTION: An apparatus 10 for providing a vacuum coating to a workpiece, including: a coating chamber containing a coating material, with the coating chamber being operable at an elevated temperature and a sub-atmospheric pressure; an electron beam gun projecting an electron beam into the coating chamber and onto the coating material, where the electron beam gun is operable to melt the coating material and to evaporate molten coating material; and, a mechanism 34 for supporting manipulating the workpiece 12 in the coating chamber 14. The supporting mechanism 34 further includes: a coupling device 58 for retaining the workpiece; a joint enabling movement of the workpiece in all directions; an intermediate member connecting the coupling device 58 and the joint; and, a device for moving the workpiece in a designated vertical plane 66. The supporting mechanism 34 may also include a device 92 connected to the intermediate member for moving the workpiece in a designated horizontal plane. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
