| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference spectrophotometer reducing remarkably a measuring time, when measuring an infrared absorption change. SOLUTION: This interference spectrophotometer is provided with: an interferometer including a light source 11 for generating an infrared ray; a fixed mirror 15; and a movable mirror 16, generates an interference light from the infrared ray, and also provided with: an optical system for irradiating a sample 23 with the interference light; and a detector 25 for detecting a reflected light or a transmission light from the sample 23. The interference spectrophotometer is also provided with: an absorption quantity calculation means for comparing an interferogram obtained by each scanning of the movable mirror 16 with an interferogram serving as a reference, to calculate an infrared absorption quantity based on a shape difference therein; and a movable mirror drive control means for limiting a driving range for the movable mirror 16 in each scanning, to an area required for collecting a data used for the infrared absorption quantity calculation in the absorption quantity calculation means. COPYRIGHT: (C)2009,JPO&INPIT |
