Apparatus, method, and system capable of producing a moveable magnetic field

摘要

An apparatus capable of producing a moveable magnetic field includes a moveable support structure ( 110 ) and a magnetic field source ( 120 ) supported by the moveable support structure, where the magnetic field source is in a fixed position relative to the moveable support structure. The magnetic field source generates a magnetic field at a wafer surface of at least approximately 50 Oersted, and the magnetic field is aligned so as to produce magnetic anisotropy in a plane of the moveable support structure.