| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser processing method capable of performing good quality processing with excellent time efficiency. <P>SOLUTION: A laser processing method comprises: a step of adjusting a spreading angle of a laser beam emitted from a laser light source; a step of irradiating the laser beam onto a proximity mask which has a through-hole and is disposed in parallel to the surface of a processing target at a predetermined distance away from the surface, while scanning the laser beam adjusted so as to have a predetermined spreading angle; a step of transferring the shape of the through hole onto the surface of the processing target by projecting the laser beam passed through the through-hole on the surface of the processing target; and a step of establishing at least one of the predetermined spreading angle and the predetermined distance based on the pre-required relationship regarding the accuracy with which the shape of the through-hole is transferred onto the surface of the processing target, the spreading angle of the laser beam, and the distance between the proximity mask and the surface of the processing target. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
