发明名称 DRIVING MECHANISM, POSTURE VARIATION ABSORBING BODY AND MACHINING APPARATUS
摘要 PROBLEM TO BE SOLVED: To prevent a posture variation from occurring in an action element, without lowering the attaching accuracy of the action element, in a driving mechanism having a function of moving various action elements such as a table. SOLUTION: A moving mechanism includes at least a guide rail 20a; a sliding body 21a engaged with the guide rail 20a to perform sliding; and a driving part for moving the sliding body 21a along the guide rail 20a and an action element fixed to the sliding body 21a. In this moving mechanism, a posture variation absorbing body 27a is interposed between the sliding body 21a and the action element, the posture variation absorbing body 27a having a sliding body fixed part 270 fixed to the sliding body 21a, an action element fixed part 271 fixed to the action element, and an absorbing part 272 that curves in a vertical direction or a horizontal direction with respect to a moving direction of the sliding body 21a corresponding to the posture variation of the sliding body fixed part 270 to absorb the posture variation. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008229811(A) 申请公布日期 2008.10.02
申请号 JP20070076386 申请日期 2007.03.23
申请人 DISCO ABRASIVE SYST LTD 发明人 SATO MASAMI
分类号 B23Q1/01;B23Q1/58;B24B41/02;H01L21/301 主分类号 B23Q1/01
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