| 摘要 |
PROBLEM TO BE SOLVED: To maintain a nozzle surface while suppressing a decrease in productivity. SOLUTION: A liquid drop discharge device includes a nozzle formed on the nozzle surface and a discharge head discharging liquid drops onto a substrate P. The discharge head is moved in a free way between the discharge area IA and a non-discharge area MA apart from the discharge area IA. In the non-discharge area MA, a removing apparatus 72 removing a functional liquid from the nozzle surface of the discharge head positioned at the non-discharge area MA and a suction apparatus 73 sucking the nozzle surface are installed. In the discharge area IA, a second removing apparatus 6 removing the functional liquid from the nozzle surface of the discharge head positioned at the discharge area IA is installed. COPYRIGHT: (C)2009,JPO&INPIT
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