| 摘要 |
PROBLEM TO BE SOLVED: To provide a microchannel array made of a resin having excellent productivity. SOLUTION: This manufacturing method of the microchannel array made of the resin has a step for forming the first resist pattern 32 having the same shape as a fine groove 16 on a substrate 31; a step for depositing a metal on the first resist pattern 32, and forming the first metal structure 33 onto which the fine groove 16 is transcribed; a step for forming the second resist pattern 34 onto which the first and second hollows 13, 14 and a wall part 15 are transcribed on the first metal structure 33; a step depositing a metal on the second resist pattern 34, and forming the second metal structure 35 having the same shape as the first and second hollows 13, 14, the wall part 15 and the fine groove 16; a step for depositing by plating on the second metal structure 35, and forming the third metal structure 36 onto which the second metal structure 35 is transcribed; and a step for forming a resin molding by using the third metal structure 36 as a die. COPYRIGHT: (C)2009,JPO&INPIT
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