| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring the temperature of substrates and capable of directly measuring the temperature of each point in mass-produced substrates and provide a jig for measuring the temperatures of substrates. SOLUTION: In the jig for measuring the temperature of substrates, a large number of tube bodies 11 are raised from a base plate 10, and sheathed thermocouples 13 with their tip parts exposed are fixed in hollow protective tubes 12, which are each held in a state elastically repelled upward by springs 20 in the tube bodies 11. In the temperature measuring method, the tip parts of a large number of the sheathed thermocouple 13 are brought into contact with a substrate P to be heated to measure the temperature of each supporting point of the substrate P by a contact system while its is being heated. COPYRIGHT: (C)2009,JPO&INPIT
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