| 摘要 |
The present invention includes a system and a method of determining the regularity of a surface of an object under examination. The method includes receiving a three-dimensional phase image of the surface including a plurality of pixels, wherein the phase image can result from a multiple wavelength interferometric analysis of the surface. The method can further include the steps of determining a relative height of the pixels in response to the phase image of the surface, creating a statistical map of the surface in response to the relative height of the pixels, and determining the regularity of the surface of the object under examination in response to the statistical map of the surface. The system includes an interferometric apparatus connected to a controller, wherein the controller is adapted to perform one or more functions similar to the method of the present invention.
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