| 摘要 |
A scrubber system in semiconductor includes a local scrubber, a plurality of pipelines connecting at least a process equipment to the local scrubber, and a flow balancing piping. The flow balancing piping includes a connecting duct, a plurality of flow balancing manifolds connecting the pipelines to the connecting duct, a plurality of first flow balancing valve respectively positioned on the flow balancing manifolds, and at least a second flow balancing valve positioned on the connecting duct.
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